The resolution of each stage is XY=0.1µm, Z=0.01µm.
Fast 3D Measurement, 1hour 20 minutes (conventional instruments) > 6 minutes per 128000 points
The highly sensitive autofocus sensor captures low levels of light refrected from the surface of the sample and directly measures steep angles and step heights.
The sample’s color does not affect the measurement.
Unevenness of the reflection within spot diameter of the reflected laser beam is small.