F-theta

It can be used in high precision microelectronics, semiconductor industry, automotive industry, medicine or other applications.

Item

Specifications

Effective focal length(EFL) 145mm
Scan Angle(Max) ±14.5deg
Scan Length(Max) 103.8mm
Scan Field(Max) 72.9mm X 72.9mm
Input Beam Diameter 14mm
Wavelength 354.7nm
Telecentricity <0.5deg
Focal Diameter 6.1um
F-Theta Distortion <6.5%
Working distance 194mm
Lens Diameter 128mm
Lens Length 113mm