DESCRIPTION
High-precision white light interferometry. The MarSurf WM 100 with new camera and functionally en larged Interferometer Software offers sub-nanometer resolution and precision.
Key benefits:
• Maximum precision with subnanometer resolution and measuring accuracy
• Fast and simple measurements- reliable results
• Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue
• Three different measuring modes: VSI, EPSI and PSI
• Special evaluation mode for small steps
• 2D surface analysis and measurement evaluations
• Topographical 3D surface analysis and measurement evaluations
• Manual table and object posi tioning in up to 4 axes
• Wide choice of lenses for perfect adjustment to the measuring object
• Sturdy design with granite base plate
Supplied with:
• Sensor system consisting of:
– WLI sensor head
– Camera, 1280 x 1024 pixels, up to 169 fps
– 100 μm piezo drive z-measuring head
• WLI software module, operating Software
• PC with Windows 10 and 24” screen
• Granite base and column with manual positioning of sensor system
• Manual XY object table for object positioning
• 20×0.4 DI lens (white light Interferometer)
