Roughness Tester Mitaka

  • The resolution of each stage is XY=0.1µm, Z=0.01µm.
  • Fast 3D Measurement, 1hour 20 minutes (conventional instruments) > 6 minutes per 128000 points
  • The highly sensitive autofocus sensor captures low levels of light refrected from the surface of the sample and directly measures steep angles and step heights.
  • The sample’s color does not affect the measurement.
  • Unevenness of the reflection within spot diameter of the reflected laser beam is small.
  • Influence of the speckle noise is small.
  • Can be measure 2D and 3D , roughness.