GEMINI Non Contact Top/Bottom Alignment Gap & Thickness Measurement Microscope
- With Top-/Bottom Optical system is available for Surface and Bottom observation same time.
- The Vertical type Focusing Target Mark device for both Top and Bottom optics will assist to obtain precise focusing images /data and reduce the measurement processing time.
- GEMINI is a multi-functioned measurement microscope for Thickness and alignment measurement.
- Precise image analysis processing system.
- Able to use with the combination of Auto Measurement stage.
Description
Applications
- The thickness of the various types of wafers
- MEMS
- Display panels
- Precise manufacturing products
- Non-contact measurement products
- The Gap of the Top/Bottom exposure products
- The oblique Gap for the hole-manufacturing
- The Repeatability of the thickness measurement: ± 1um
