DESCRIPTION
The multi-measurement solution MarSurf CWM 100 is a precise optical measuring instrument with sub-nanometer resolution combining a confocal microscope with a white light Interferometer.
Key benefits:
• Highest precision with subnanometer resolution
• Universal suitability for technical, optical and reflective surfaces. Also for surfaces of printed circuit boards and semiconductor products as well as biological tissues
• 2D surface analysis and measuring evaluations
• Topographic 3D surface analysis and measuring evaluations
• Intelligent measuring strategies- fast measurements – short measuring times
• Microscope image field sizes, easily expandable by fully automatic stitching
• Automatic table or object positioning: 100 mm x 100 mm, longer distances on request
• A wide range of lenses allows for an ideal adaptation to the measurement object
• Solid construction with granite base plate and granite column for the best possible vibration damping
Supplied with:
• Sensor system consists of:
– Confocal microscope & WLI with 6x nosepiece
– Camera, 780 x 580 pixels, up to 48 images/s (standard version)
– 100 mm CNC controlled Z axis with integrated Heidenhain glass scale
• One operating software with WLI and confocal software modules
• Granite base frame and column with sensor system and CNC controlled object table
• CNC controled motorized Z axis and XY table for probe positioning and image field merging
• Lenses (optional)
– 4x to 150x (confocal microscope)
– 2.5x to 100x (white light Interferometer)
